TE 01 Excitation of an Electron Cyclotron Resonance Plasma Source
نویسنده
چکیده
The uniformity of plasma generation in electron cyclotron resonance (ECR) reactors for materials processing, and the subsequent uniformity of fluxes to the substrate, are generally a function of the mode of the microwave radiation injected into the chamber. In this paper, a finite difference time domain (FDTD) simulation is used to demonstrate the consequences of exciting an ECR reactor using a TE01 mode. Due to the off axis peak in the electric field, power deposition and the plasma density peak off axis. Diffraction of the field around the resonance zone produces a secondary maximum in electron density downstream.
منابع مشابه
گرم کردن پلاسما با امواج برنشتاین الکترونی از طریق واگردانی امواج عادی و فراعادی درلایه UHR
Magnetically confined plasma can be heated with high power microwave sources. In spherical torus the electron plasma frequency exeeds the electron cyclotron frequency (EC) and, as a consequence, electromagnetic waves at fundamental and low harmonic EC cannot propagate within the plasma. In contrast, electron Bernstein waves (EBWs) readily propagate in spherical torus plasma and are absorbed str...
متن کاملPsfc/ja-01-36 Electron Bernstein Waves in Spherical Tokamaks
In the electron cyclotron range of frequencies, the high-β NSTX plasmas are overdense to the traditional extraordinary X mode and/or the ordinary O mode. For low harmonics of the electron cyclotron frequency, the X and O modes are cutoff at the edge and for high harmonics the plasma is essentially optically thin to these modes. Thus, heating of such plasmas by electron cyclotron waves or diagno...
متن کاملDevelopment of a compact thermal lithium atom beam source for measurements of electron velocity distribution function anisotropy in electron cyclotron resonance plasmas.
The anisotropy of the electron velocity distribution function (EVDF) in plasmas can be deduced from the polarization of emissions induced by anisotropic electron-impact excitation. In this paper, we develop a compact thermal lithium atom beam source for spatially resolved measurements of the EVDF anisotropy in electron cyclotron resonance (ECR) plasmas. The beam system is designed such that the...
متن کاملPlasma expansion from a dielectric electron cyclotron resonance source
The boundary conditions in an electron cyclotron resonance (ECR) source have been modified to mimic the operating conditions where current-free double-layers (DLs) have been recently measured in rf helicon plasmas. The plasma is heated or generated by the ECR at 875 G inside a dielectric source tube, and expands into a grounded diffusion chamber (terminated by a glass plate) by a rapidly decrea...
متن کاملConceptual Design of a Sputter-type Negative Ion Source Based on Electron Cyclotron Resonance Plasma Heating
A design for a negative ion source based on electron cyclotron resonance plasma heating and ionization by surface sputtering is presented. The plasma chamber of the source is an rf-cavity designed for TE111 eigenmode at 2.45 GHz. The desired mode is excited with a loop antenna. The ionization process takes place on a cesiated surface of a biased converter electrode (cathode). The ion beam is fu...
متن کامل